Catalog Listings AWM3100V AWM3150V AWM3200V AWM3300V
Flow Range (Full Scale) +200 sccm +30 sccm +1000 sccm
Pressure Range
(See Application Note 1) +2.0N H2O (5 mBar)
Output Voltage @ Trim Point 5 VDC @ 200 sccm 3.4 VDC @ 25 sccm 5 VDC @ 2N H2O 5 VDC @ 1000 sccm
Null Voltage 1.00 ±0.05 VDC 1.00 ±0.10 VDC 1.00 ±0.08 VDC 1.00 ±0.10 VDC
Null Voltage Shift, Typ.
+25° to −25°C, 25° to +85°C ±25 mV ±100 mV ±25 mV ±25 mV
Output Voltage Shift, Max.
+25° to −25°C −4% Reading ±5% Reading +24% Reading (Note 3) −5% Reading
+25° to +85°C +4% Reading ±5% Reading −24% Reading +5% Reading
Repeatability & Hysteresis, Max. ±0.50% Reading ±1% Reading ±0.50% Reading ±1% Reading
Min. Typ. Max.
Excitation VDC (Note 2) 8.0 10±0.01 15
Power Consumption (mW) — 50 60
Response Time (msec) (Note 1) — 1.0 3.0
Common Mode Pressure (psi) — — 25
Temperature Range Operating: −25° to +85°C (−13° to +185°F); Storage: −40° to +90°C (−40° to +194°F)
Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square
Weight (grams) 10.8
Shock Rating 100 g peak (5 drops, 6 axes)
Notes:
1. Initial warm-up time for signal conditioned circuitry is 1 minute max.
2. Output Voltage is ratiometric to supply voltage.
3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. (See Application Note 1.)
4. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1 sec.